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Managing hazardous process exhausts in high volume manufacturing

The relentless scaling of structures and reduction in thermal process budgets that characterize state- of-the-art integrated circuit (IC) production have resulted in the incorporation of many complex and hazardous materials into high-volume manufacturing (HVM) processes. In order to meet the need to deposit these materials at ever-lower temperatures, many of the new process chemicals have low vapor pressures, are highly reactive and present serious hazards to personnel and equipment. Many new CVD precursors and their associated reaction by-products are flammable, pyrophoric, toxic (harmful-to-health), corrosive or otherwise hazardous to personnel or destructive to equipment, and have a tendency to condense in pipe-work, including process exhausts.

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Ferrer

Ferrer is an international pharmaceutical company, headquartered in Barcelona with a presence in more than 90 countries. Our mission is to advance the wellbeing of society. We make our contribution through the pharmaceutical, health, fine chemicals and food sectors. Global reach Since the early 70s, Ferrer has gone from being one of the leading Spanish pharmaceutical companies to having an important international presence. Now, through a network of affiliates, joint ventures and partnerships, our products can be purchased from San Francisco to Seoul and from Berlin to Buenos Aires. Innovation for life: In Ferrer, we discover, research and develop medicines, diagnostics, vaccines, fine chemicals, food and feed. This commitment, put into practice every day across our R&D centres in Spain and abroad, has been recognised with the highest possible rating by the Spanish government's Profarma assessment system. Diversified healthcare: Ferrer operates across the entire healthcare spectrum. P

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Chemical Management

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Spotlight

Ferrer

Ferrer is an international pharmaceutical company, headquartered in Barcelona with a presence in more than 90 countries. Our mission is to advance the wellbeing of society. We make our contribution through the pharmaceutical, health, fine chemicals and food sectors. Global reach Since the early 70s, Ferrer has gone from being one of the leading Spanish pharmaceutical companies to having an important international presence. Now, through a network of affiliates, joint ventures and partnerships, our products can be purchased from San Francisco to Seoul and from Berlin to Buenos Aires. Innovation for life: In Ferrer, we discover, research and develop medicines, diagnostics, vaccines, fine chemicals, food and feed. This commitment, put into practice every day across our R&D centres in Spain and abroad, has been recognised with the highest possible rating by the Spanish government's Profarma assessment system. Diversified healthcare: Ferrer operates across the entire healthcare spectrum. P

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